University of California, Riverside


MSE 238: Introduction to Microelectromechanical Systems

MSE 238 Introduction to Microelectromechanical Systems (4) Lecture, 4 hours. 
Prerequisite(s): ME 110, ME 114, or equivalents.

An introduction to the design and fabrication of microelectromechanical systems (MEMS). Topics include micromachining processes; material properties; transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; microfluidic devices; BioMEMS and applications; packaging and reliability concepts; and metrology techniques for MEMS. Cross-listed with ME 270.


Cengiz Ozkan 


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University of California, Riverside
900 University Ave.
Riverside, CA 92521
Tel: (951) 827-1012

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Bourns College of Engineering
446 Winston Chung Hall

Tel: (951) 827-5190
Fax: (951) 827-3188

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